Skip to Content

Macquarie Engineering and Technical Services

Remote Plasma Enhanced Laser Induced Chemical Vapour Deposition Unit (RPELICVDU)

RPELICVDU

RPELICVDU was designed in the Division of ICS and manufactured in THE METS workshop. Its construction involved several technologies and extremely fine tolerances, high vacuum and temperature capable processes. Much of the work done on this equipment is classified, leading edge semiconductor substrate manufacture. The project has involved extensive international collaboration and close liaison between the customer and the METS workshop.

RPELICVDU RPELICVDU

 

RPELICVDU
Stainless steel vacuum fitting welded by METS for a power feedthrough for the vacuum heater.
RPELICVDU
Ultra-high vacuum rotable heater assembly with the tanatulum heater and ceramic former having been prepared by METS.
RPELICVDU
6" stainless steel conflat vacuum fitting with 1 and 1/3" fitting prepared by METS, a rotary feedthru connection and a heater / thermocouple connection.